Substrate with integrated filter for gas sensor assemblies

摘要

The gas sensor arrangement (100), has a measuring chamber (102), which has an inlet opening (108) for entering the sample gas in the measuring chamber. A detector device produces an output signal in the measuring chamber, dependent on the presence or concentration of the analyte. The measuring chamber is arranged on a substrate (104) and a filter (110) is arranged at the inlet opening for filtering the entering sample gas. Independent claims are also included for the following: (1) substrate for installing a gas sensor arrangement for detecting analyte in sample gas (2) method for manufacturing a gas sensor arrangement for detecting analyte in sample gas.