Apparatus for extraction ion beam,申请号KR20050001719-传众专利搜索

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发明名称	Apparatus for extraction ion beam
摘要
申请公布号	KR100851901(B1)	申请公布日期	2008.08.13
申请号	KR20050001719	申请日期	2005.01.07
申请人		发明人
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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