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发明名称
Method of forming a structured layer on a substrate
摘要
申请公布号
EP1955113(A1)
申请公布日期
2008.08.13
申请号
EP20060819306
申请日期
2006.11.07
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CHUDZIK, MICHAEL, PATRICK;SHEPARD, JOSEPH, FRANCIS, JR.
分类号
G03F7/00
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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