发明名称 |
MICRO-ELECTROMECHANICAL DEVICE |
摘要 |
Provided is a micro-electromechanical device capable of processing an electric signal in the high frequency region by a simple device structure. The micro-electromechanical device is formed, including an oscillator element having a plurality of electrodes disposed on a substrate and a beam facing the electrodes to oscillate by electrostatic drive. An input/output of a high frequency signal is applied to one of the combinations of the electrodes and the beam.
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申请公布号 |
EP1956706(A1) |
申请公布日期 |
2008.08.13 |
申请号 |
EP20060823178 |
申请日期 |
2006.11.08 |
申请人 |
SONY CORPORATION |
发明人 |
TANAKA, MASAHIRO;KINOSHITA, TAKASHI;YAMASHITA, KEITARO |
分类号 |
H03H9/24;B81B3/00;H02N13/00;H03H9/46 |
主分类号 |
H03H9/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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