| 发明名称 |
SEMICONDUCTOR THIN FILM, METHOD FOR PRODUCING SAME, AND THIN FILM TRANSISTOR |
| 摘要 |
<p>A transparent semiconductor thin film (40) having low carrier concentration and large energy band gap is produced by forming a thin film, which contains indium oxide and an oxide of a positive divalent element, and then oxidizing or crystallizing the thin film.</p> |
| 申请公布号 |
KR20080074888(A) |
申请公布日期 |
2008.08.13 |
| 申请号 |
KR20087011740 |
申请日期 |
2008.05.16 |
| 申请人 |
IDEMITSU KOSAN CO., LTD. |
发明人 |
YANO KOKI;INOUE KAZUYOSHI;SHIMANE YUKIO;SHIBUYA TADAO;YOSHINAKA MASAHIRO |
| 分类号 |
H01L29/786;C01G15/00 |
主分类号 |
H01L29/786 |
| 代理机构 |
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