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发明名称
摘要
申请公布号	JP4133659(B2)	申请公布日期	2008.08.13
申请号	JP20030275027	申请日期	2003.07.15
申请人		发明人
分类号	H01L21/283;H01L21/316;C23C16/40;C23C16/44;C23C16/455;H01L21/02;H01L21/28;H01L21/31;H01L21/336;H01L21/8238;H01L29/51;H01L29/78	主分类号	H01L21/283
代理机构		代理人
主权项
地址

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