SHOWER PLATE AND PLASMA TREATMENT APPARATUS USING SHOWER PLATE

摘要

A shower plate 31 for plasma processing, which is formed by a plurality of pipes, is provided. A pipe 31 A3 comprises a porous material member 44 which is disposed along the pipe, which has a predetermined porosity with respect to a material gas, and which has an outwardly convex shape, and a metal member 41 which is faced to the porous material member 44 and which forms a material gas flow path 43 in combination with the porous material member 44. A nozzle structure capable of releasing the material gas with a spread can be realized.