发明名称 |
Method of fabricating micro-lens and method of fabricating optical module using the method |
摘要 |
A method of fabricating a micro-lens, and a method of fabricating an optical module using the method are provided. To fabricate a micro-lens, a thin film is formed of a material for the micro-lens on a substrate. A photoresist pattern is formed on the thin film, a thin-film structure is formed by etching the thin film using the photoresist pattern, and the micro-lens is completed by reflow by thermally treating the thin-film structure.
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申请公布号 |
US7410749(B2) |
申请公布日期 |
2008.08.12 |
申请号 |
US20030735192 |
申请日期 |
2003.12.12 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHO JAE-GEOL;JUNG SUN-TAE |
分类号 |
G02B6/42;G03F7/00;G02B1/10;G02B3/00;G02B6/13;G03F7/20 |
主分类号 |
G02B6/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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