发明名称 Method of fabricating micro-lens and method of fabricating optical module using the method
摘要 A method of fabricating a micro-lens, and a method of fabricating an optical module using the method are provided. To fabricate a micro-lens, a thin film is formed of a material for the micro-lens on a substrate. A photoresist pattern is formed on the thin film, a thin-film structure is formed by etching the thin film using the photoresist pattern, and the micro-lens is completed by reflow by thermally treating the thin-film structure.
申请公布号 US7410749(B2) 申请公布日期 2008.08.12
申请号 US20030735192 申请日期 2003.12.12
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO JAE-GEOL;JUNG SUN-TAE
分类号 G02B6/42;G03F7/00;G02B1/10;G02B3/00;G02B6/13;G03F7/20 主分类号 G02B6/42
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