发明名称 Semiconductor assembly having substrate with electroplated contact pads
摘要 An apparatus comprising an insulating substrate having first and second surfaces and a plurality of metal-filled vias extending from the first to the second surface. The first and second surfaces have contact pads, each one comprising a connector stack to at least one of the vias. The stack comprises a seed metal layer in contact with the via metal capable of providing an adhesive and conductive layer for electroplating on its surface, a first electroplated support layer secured to the seed metal layer, a second electroplated support layer, and at least one reflow metal bonding layer on the second support layer. The electrolytic plating process produces support layers substantially pure (at least 99.0%), free of unwanted additives such as phosphorus or boron, and exhibiting closely controlled grain sizes. Reflow metal connectors provide attachment to chip contact pads and external parts.
申请公布号 US7411303(B2) 申请公布日期 2008.08.12
申请号 US20070620134 申请日期 2007.01.05
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 ABBOTT DONALD C.
分类号 H01L23/48 主分类号 H01L23/48
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