Susceptor for deposition process equipment and method of fabricating a heater therein

摘要

A susceptor for deposition process equipment is provided. The susceptor includes a heater that heats the susceptor. The heater includes a sheath. The sheath surrounds a heating wire and is filled with an insulating ceramic material. An isolation layer is formed opposing ends of the sheath to isolate the ceramic material from the ambient environment. The isolation layer is formed from a lead/glass mixture that blocks moisture in the ambient environment from being absorbed by the insulating material. Input/output terminals are connected to the heating wire. The input/output terminals pass through the isolation layer and are exposed to the ambient environment. Current is supplied to the heating wire through the input/output terminals to heat the heating wire.