发明名称 Apparatus for forming a thin film using an inkjet printing method
摘要 In an apparatus of forming a thin film, the apparatus has a printing chamber that forms a thin film on a substrate. The apparatus has at least two drying chambers that receive the substrate on which the thin film is formed and dry the thin film on the substrate. The two drying chambers may be independently controlled. Accordingly, the apparatus may reduce process time for forming the thin film without contamination of the substrate.
申请公布号 US7410251(B2) 申请公布日期 2008.08.12
申请号 US20040991185 申请日期 2004.11.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHUNG JIN-KOO;CHOI JOON-HOO;LEE DONG-WON
分类号 B41J2/01;G02F1/13;C03C17/00;H01L51/40 主分类号 B41J2/01
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