CHEMICAL MECHANICAL POLISHING COMPOSITION,申请号KR20070025038-传众专利搜索

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发明名称	CHEMICAL MECHANICAL POLISHING COMPOSITION
摘要
申请公布号	KR100851615(B1)	申请公布日期	2008.08.12
申请号	KR20070025038	申请日期	2007.03.14
申请人		发明人
分类号	C09K3/14;B24B37/00;H01L21/304	主分类号	C09K3/14
代理机构		代理人
主权项
地址

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