发明名称 |
Apparatus and method for verifying an integrated circuit pattern |
摘要 |
A first generator section generates a tolerance data corresponding to a target pattern set based on a design data of a semiconductor device. A second generator section generates an image data of a semi-conductor device pattern formed based on the target pattern. An extraction section extracts a contour data of the pattern from the image data supplied from the second generator section. A data synthesizing section is supplied with the tolerance data supplied from the second generator section and the contour data supplied from the extraction section. The data synthesizing section overlaps the tolerance data with the contour data.
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申请公布号 |
US7412671(B2) |
申请公布日期 |
2008.08.12 |
申请号 |
US20040948540 |
申请日期 |
2004.09.24 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
ITO TAKESHI;IKEDA TAKAHIRO;HASHIMOTO KOJI |
分类号 |
G01B11/24;G06F17/50;G01B21/20;H01L21/66 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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