| 摘要 |
A method and device for inhibiting contamination of a workpiece during the heating of a workpiece by a contaminant. The method includes placing the workpiece in a first container, and, in a first step, filling the first container with a protective gas. The first container is placed in a second container, and in a second step, the second container, and hence the first container contained therein, is evacuated to create a vacuum inside the first and second containers so that during the first and second steps the partial pressure is reduced for the contaminants in the first container before the workpiece is heated.
|
