发明名称 HEAT TREATMENT JIG AND HEAT TREATMENT JIG SET
摘要 A heat treatment jig includes a holding concave portion to hold an object and a void part formed near the holding concave portion and a thermal history variation of the object in a heat treatment process is reduced thereby.
申请公布号 KR100851014(B1) 申请公布日期 2008.08.12
申请号 KR20070062348 申请日期 2007.06.25
申请人 发明人
分类号 H01L21/324 主分类号 H01L21/324
代理机构 代理人
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