发明名称 BONDING HEAD FOR BONDING MACHINE
摘要 A chip transfer head of bonding equipment is provided to minimize loss of a chip in a process for transferring the chip to a bonding head by preventing a breakdown of a chip buffer. A driving unit is installed in a unit body(91). A fixing body(110) is fixed to the driving unit and is rotated by using the driving force of the driving unit. A head(150) is movably coupled with the fixing body and is rotated around the fixing body according to the rotation of the fixing body to absorb a chip from a lower side and to transfer the chip to an upper side. A head pulling unit pulls the head from the lower side to reduce a contact shock between the head and the chip. A head supporting unit is connected to the head and the fixing body to support elastically the head.
申请公布号 KR100851567(B1) 申请公布日期 2008.08.12
申请号 KR20070032933 申请日期 2007.04.03
申请人 TOP ENGINEERING CO., LTD. 发明人 CHOI, HAN HYOUN
分类号 H01L21/48 主分类号 H01L21/48
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