MULTI-ARTICULATED ISDG WITH IMPROVED RECEPTION MEMBER

摘要

A multi-articulated ISDG(Interferometric Strain/Displacement Gage) with an improved photodetector is provided to adjust a translation of first and second Z-axis positioners, an X-axis positioner, and a Y-axis positioner. First and second z-axis positioners(21,22) are mounted on a post and moved in a vertical direction with a translational. A light irradiating part(30) is mounted on the first z-axis positioner to irradiate a laser beam to a maker of a test sample. An X-axis positioner(24) is coupled to the end portion of a Y-axis rotationer(23). A Y-axis positioner(25) is coupled to the end portion to perform a translation in a Y axis. A Y-Z fine positioner(26) is coupled to the end of the Y axis positioner so that fine adjustment is achieved with respect to a plane formed by Y and Z axes.