发明名称 IMAGE SENSOR AND METHOD FOR MANUFACTURING THEREOF
摘要 An image sensor and a manufacturing method thereof are provided to reduce a process cost necessary for improving resolution by integrating vertically transistor circuits and photodiodes. A CMOS circuit including an external wiring(120) is formed on a substrate(110). A first electrode(140), an intrinsic layer(170), and a conducting layer(180) of a second conductive type, and a second electrode(190) are formed on the substrate. A via hole is formed in a boundary of a pixel to isolate the first electrode, the intrinsic layer, the conducting layer of the second conductive type, and the second electrode from each other. A light absorption layer(200) is formed in the via hole. An interlayer dielectric(160) is formed on the light absorption layer to bury the via hole.
申请公布号 KR100851759(B1) 申请公布日期 2008.08.11
申请号 KR20070042904 申请日期 2007.05.03
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 SHIM, CHEON MAN
分类号 H01L27/146 主分类号 H01L27/146
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