| 摘要 |
A probe card having a planarization unit is provided to remove interference between a first planarization control unit and a second planarization control unit by coupling the first and second planarization control units to a probe substrate. A probe substrate(102) is electrically connected to a printed circuit board. The probe substrate has plural probes(101). A first planarization control unit(110) applies power to a central region of the probe substrate to control planarization of the probe substrate. A second planarization control unit(115) applies power to an external circumference region of the probe substrate to control the planarization of the probe substrate. A floating mount unit(114) is mounted on the probe substrate. The floating mount unit is arranged and separated from the printed circuit board. The first planarization control unit is arranged on a central region of the floating mount unit. A space deformer(103) is arranged between the printed circuit board and the probe substrate.
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