发明名称 METHOD OF MANUFACTURING A LIGHT EMITTING DEVICE
摘要 A method for manufacturing a light emitting device is provided to make an organic compound layer compact and to prevent contamination between function regions due to impurities by continuously forming the organic compound layer with the function regions in the same film-forming chamber. A method for manufacturing a light emitting device includes the steps of: arranging a first evaporation source(302a) with a first compound(303a) and a second evaporation source(302b) with a second compound(303b) in a film-forming chamber(301); forming a layer made of a mixture of the first and second compounds on a substrate through deposition by heating the first and second evaporation sources; and forming a compact layer made of the mixture of the first and second compounds by irradiating light to the layer made of the mixture of the first and second compounds.
申请公布号 KR20080073273(A) 申请公布日期 2008.08.08
申请号 KR20080069616 申请日期 2008.07.17
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;SEO SATOSHI;SHIBATA NORIKO
分类号 H05B33/10;C23C14/02;C23C14/12;C23C14/24;C23C14/56;H01L51/00;H01L51/30;H01L51/40;H01L51/50 主分类号 H05B33/10
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