发明名称 |
METHOD OF MANUFACTURING A LIGHT EMITTING DEVICE |
摘要 |
A method for manufacturing a light emitting device is provided to make an organic compound layer compact and to prevent contamination between function regions due to impurities by continuously forming the organic compound layer with the function regions in the same film-forming chamber. A method for manufacturing a light emitting device includes the steps of: arranging a first evaporation source(302a) with a first compound(303a) and a second evaporation source(302b) with a second compound(303b) in a film-forming chamber(301); forming a layer made of a mixture of the first and second compounds on a substrate through deposition by heating the first and second evaporation sources; and forming a compact layer made of the mixture of the first and second compounds by irradiating light to the layer made of the mixture of the first and second compounds.
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申请公布号 |
KR20080073273(A) |
申请公布日期 |
2008.08.08 |
申请号 |
KR20080069616 |
申请日期 |
2008.07.17 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI SHUNPEI;SEO SATOSHI;SHIBATA NORIKO |
分类号 |
H05B33/10;C23C14/02;C23C14/12;C23C14/24;C23C14/56;H01L51/00;H01L51/30;H01L51/40;H01L51/50 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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