| 摘要 |
Disclosed is a display wherein a light-emitting device can be protected by a protective film having good sealing characteristics and sidewall step coverage. Consequently, the display is prevented from deterioration of the light-emitting device, thereby maintaining good display characteristics. Specifically disclosed is a display (1) wherein an organic electroluminescent device (3) formed on a substrate (2) is covered with a protective film (4). This display (1) is characterized in that the protective film (4) is composed of silicon nitride films (4a, 4b, 4c) formed in layers by a chemical vapor deposition method using an ammonia gas, and the surface layer of the protective film (4) is composed of a high-density silicon nitride film (4c) and a low-density silicon nitride film (4b) having a lower density than the high-density silicon nitride film (4c) is arranged below the surface layer. |
