| 摘要 |
A bidirectional z-axis accelerometer is provided to decrease a manufacturing cost of the z-axis accelerometer by measuring a Z-axis acceleration in both directions by using a comb with a half step difference structure. A bidirectional z-axis accelerometer includes first and second electrodes(331,332). The first electrode is arranged on first and second regions on a board and moved in upward and downward directions according to an applied Z-axis acceleration. The second electrode is fixed on the board with a predetermined distance from the first electrode. One end of the second electrode is arranged to be parallel to the first electrode. The second electrode is protruded more than the first electrode in the first region. In the second region, the second electrode is protruded less than the first electrode. The Z-axis acceleration is detected by using a variation of a capacitance, which is changed by an overlap area between the first and second electrodes. |
