| 摘要 |
A sensor unit and a method for manufacturing the same are provided to increase reaction area for detection without making the sensor unit large by employing a reaction unit having a reaction area of a three dimensional structure having reaction inducing material. A sensor unit comprises a base(110), an actuator(120), and reaction units(130,140). The actuator has a cantilever structure in which one end of the actuator protrudes on the base. The reaction units are installed at one side of the actuator and have reaction areas of a three dimensional structure, wherein reaction inducing material is located in the reaction area for a detected material. The reaction unit reacts with regard to the detected material and detects reaction through deformation of the actuator.
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