摘要 |
<P>PROBLEM TO BE SOLVED: To read information in detail even when a surface where the information is entered is not plane. <P>SOLUTION: A plurality of cells each comprising a photosensor 51 and a thin film transistor 52 are arrayed on a substrate 20 having a TiO<SB>2</SB>film 22 formed on a surface of stainless steel foil 23, where each of photosensors 51 has electrodes 71 and 72 formed on a laminate of a silicon layer 73 and a silicon oxide film 74 and each of thin film transistors 52 has a gate electrode 61 and drain/source electrodes 62 and 63 formed on a laminate of a silicon layer 64 and a silicon oxide film 65, the photosensors 51 and thin film transistors 52 being laminated on one another by the cells. <P>COPYRIGHT: (C)2008,JPO&INPIT |