| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laminated optoelectric converter in which incident light quantity control effect is attained by providing an intermediate layer between the optoelectric conversion layers, and the optoelectric conversion efficiency is enhanced by reducing carrier recombination on the interface of the intermediate layer and a semiconductor layer, and also to provide its fabrication process. <P>SOLUTION: The laminated optoelectric converter includes a laminate of a plurality of silicon-based optoelectric conversion layers having a pin structure wherein at least a pair of adjoining optoelectric conversion layers sandwiches an intermediate layer composed of silicon nitride, the pair of optoelectric conversion layers is interconnected electrically, and a p-type silicon based semiconductor layer which is a part of the optoelectric conversion layer and is in contact with the intermediate layer contains nitrogen atoms. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
