| 摘要 |
PROBLEM TO BE SOLVED: To provide a control unit of the shape of a laser beam having an optical system controlling the intensity of the beam in the direction of the minor axis to both of a uniformized shape and a Gaussian distribution shape. SOLUTION: The control unit of the shape of laser beams has: a laser light source 3; and an optical system 5 for changing laser beams from the laser light source to those where a section vertical to the advance direction of the laser beams becomes sidelong. The optical system has: a minor axis optical system 5a for controlling a sidelong vertical beam shape; and a major axis optical system 5b for controlling a sidelong horizontal beam shape. The minor axis optical system has: lens arrays 11a, 11b for minor axes for dividing laser beams into a plurality of beams in the direction of the minor axis; and a condenser lens 13 for minor axes that is provided at the downstream of the lens array for the minor axis and overlaps a plurality of beams. The lens array for the minor axis can be attached to or detached from the optical system 5. COPYRIGHT: (C)2008,JPO&INPIT |
