FOREIGN SUBSTANCE REMOVING DEVICE AND FOREIGN SUBSTANCE REMOVING METHOD

摘要

There is provided a foreign substance removing device which is capable of moving a foreign substance in a desired direction at a high removing efficiency. The foreign substance removing device removes a foreign substance on an object. A vibrator has first and second piezoelectric elements provided on the object. Power supplies applies alternating voltages to the respective first and second piezoelectric elements. A control circuit controls the alternating voltages applied by the power supplies. The control circuit changes the frequency of the alternating voltage and at the same time makes respective phases of the alternating voltages applied to the first and second piezoelectric elements different from each other, so as to concurrently generate a first standing wave and a second standing wave different in order.