| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gray tone mask, having high accuracy, having a semi-transmitting part that includes a portion showing flat distribution of the intensity of transmitted light and gives predetermined intensity of light, and capable of forming a resist pattern in a desired film thickness range having a flat portion with almost constant film thickness when the semi-transmitting part is transferred onto a resist film of a transfer material. <P>SOLUTION: The gray tone mask 30 has a light shielding part 31, a light transmitting part 32 and a semi-transmitting part 33 formed on a transparent substrate 34, wherein the mask has the semi-transmitting part 33 adjoining to and interposed by the light shielding part 31. The semi-transmitting part 33 includes semi-transmitting film formation part 33a where a semi-transmitting film 36 is formed and light-transmitting slits 33b, 33c where the transparent substrate 34 is exposed, the slits being formed in the boundary of the semi-transmitting part 33 with the adjoining light transmitting part 31. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
