NANO-IMPRINTING STAMPER, ITS MANUFACTURING METHOD AND SURFACE TREATMENT AGENT OF NANO-IMPRINTING STAMPER

摘要

PROBLEM TO BE SOLVED: To provide a nano-imprinting stamper capable of simply depositing a peeling layer on the surface of a stamper and excellent in durability reduced in the deterioration of peeling properties even if transfer is continuously performed over a large number of times. SOLUTION: Fluorine-containing polyether 102 is applied to the surface of the stamper 2 having a fine pattern, which is transferred to a transfer target, formed to its surface and at least one of both terminals of the fluorine-containing polyether 102 is chemically bonded to the surface of the stamper 2. The fluoropolyether chain of the fluorine-containing polyether 102 is characterized in that a part of the fluorine atoms of the main chain of a perfluoropolyether chain are substituted with hydrogen atoms. COPYRIGHT: (C)2008,JPO&INPIT