| 摘要 |
PROBLEM TO BE SOLVED: To provide a microwave discharge lamp system in which impedance matching of the microwave discharge lamp is performed with a simple structure and the size is made small. SOLUTION: The microwave discharge lamp system combines the microwave from a microwave oscillator with a discharge lamp 3 by using an antenna 1 and a metallic chamber 5. The antenna 1 has an antenna adaptor 2 for changing the cross-section area of the antenna 1 installed in a face vertical to the length direction of the antenna 1, and impedance matching is realized. COPYRIGHT: (C)2008,JPO&INPIT
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