| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck that can highly flatten a dielectric layer and reduce temperature dependency, can restrain the occurrence of particles and gas, and is extremely thin and less expensive, and to provide a manufacturing method of the electrostatic chuck. <P>SOLUTION: An attraction electrode 3 is formed on a disklike substrate 2 formed by quartz glass by flame spraying, and the dielectric layer 4 made of quartz glass is formed by flame spraying so that the attraction electrode 3 is covered. Then, on the surface of the dielectric layer 4, a number of embosses 5 are formed by flame spraying. The attraction electrode 3 is preferably formed in a structure where a number of small electrode pieces are connected by a thin electrode wire. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
