| 发明名称 |
CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM |
| 摘要 |
In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
|
| 申请公布号 |
US2008187419(A1) |
申请公布日期 |
2008.08.07 |
| 申请号 |
US20080099780 |
申请日期 |
2008.04.08 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RICE MICHAEL R.;ENGLHARDT ERIC A.;LOWRANCE ROBERT B.;ELLIOTT MARTIN R.;HUDGENS JEFFREY C.;VAN KATWYK KIRK;PURI AMIT |
| 分类号 |
H01L21/67;H01L21/68;B65G49/05;B65G49/06;B65G49/07;H01L21/00;H01L21/677 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
