| 摘要 |
A component for a printhead is created by forming a PZT wafer forming a region of SU8 photoresist material on one side of the PZT wafer; sawing in a second side of said planar body, opposite said first side, actuator channels to a depth sufficient to expose an area of the photoresist material; forming a nozzle through the layer of photo-resist material in the exposed area such that then nozzle is in communication with the actuator channels. The region of photoresist material may be used to form a nozzle plate using photolithography. |
