| 摘要 |
A small size, light weight and low manufacturing cost motor control device is provided for making it possible to comply with the requirement of the SEMI-F47 specification. A motor control circuit is provided with a main circuit comprised of a converter unit (2) that converts an alternating current electric power source to direct current electric power source, a smoothing capacitor (5) connected in parallel with the direct current electric power source, an inverter unit (3) that inverts the direct current electric power source to the alternative current electric power source; and a control circuit comprised of a position and speed control unit (11) that generates a speed instruction from a position instruction and a motor position and also generates a first torque instruction from the speed instruction and a motor speed, and a torque control unit (13) that converts the torque instruction to an electric current instruction and generates a PWM gate signal from the electric current instruction and a motor electric current. The motor control circuit is further comprised of a voltage detecting unit (14) that generates a voltage shortage warning signal when detecting that a direct current voltage of the direct current electric power source becomes lower than a predetermined voltage and outputs it an upper position controller, and a torque limiting unit (12) that limits the first torque instruction to a limiting signal of the upper position controller and generates a second torque instruction.
|
