MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an MEMS device in which the damage of the MEMS device due to an external shock, and an increase in costs accompanying the damage can be prevented and to provide a method of manufacturing the MEMS device. SOLUTION: The microelectromechanical systems (MEMS) device includes a frame 111, an actuator 115 formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper 140 or 150 restricting a displacement of the actuator in a direction along the height of the actuator. A method of fabricating a microelectromechanical systems (MEMS) device comprises steps of: bonding a second substrate 130 to a first substrate 110; forming a frame and an actuator connected to the frame to be capable of performing a relative motion with respect to the frame by partially removing the first substrate; and forming at least one stopper which restricts a displacement of the actuator in a direction along the height of the actuator by partially removing the second substrate. COPYRIGHT: (C)2008,JPO&INPIT