| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal orientation measuring device capable of correcting a notch positioning error caused by a notch shape error or the like, and having high accuracy of measurement of a radial crystal orientation. SOLUTION: This device includes a rotation part 11 for rotating a cylindrical crystal 2 around a cylindrical axis; a positioning part 12 for rotating the cylindrical crystal 2, and positioning the cylindrical crystal 2 based on a notch 2a provided on the circumferential side face of the cylindrical crystal 2; a notch measuring part 12 for measuring a notch 2 position with respect to the rotation axis, when the cylindrical crystal 2 is positioned; a crystal orientation measuring part 13 for measuring the radial crystal orientation by irradiating the circumferential side face with an X-ray; and a correction part 142 for correcting the crystal orientation measured by the crystal orientation measuring part 13 with the notch position measured by the notch measuring part 12, and determining the radial crystal orientation. COPYRIGHT: (C)2008,JPO&INPIT
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