| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample inspection device and a sample inspection method capable of preventing a film from being broken by a manipulator, when inspecting a sample by giving a stimulus to the sample by the manipulator, and by irradiating it with a primary beam via the film. SOLUTION: The sample inspection device has a primary beam irradiation means 1 for irradiating the sample 20 with the primary beam 7 via the film 32, a signal detection means 4, the manipulator 26 equipped with a tip part approachable to the sample 20 or contactable therewith, a measuring means for measuring the position of the film 32, and a control means 28 for controlling each operation of the primary beam irradiation means 1, the signal detection means 4, the manipulator 26 and the measuring means. The control means 28 controls operation of the manipulator 26 so that avoidance of contact with the film 32 by the tip part of the manipulator 26 or operation restriction of the manipulator 26 at the contact time is performed based on a measurement result by the measuring means. COPYRIGHT: (C)2008,JPO&INPIT
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