| 摘要 |
PROBLEM TO BE SOLVED: To provide a stylus of a contact displacement sensor suitable for measuring the fine shapes of micro parts and micro lens arrays constituting micro machines and capable of achieving high resolution and provide its manufacturing equipment and a contact displacement sensor. SOLUTION: The stylus of a contact displacement sensor has a ball 2 mounted at a tip of a stylus shaft 1. A tip part 1a of the stylus shaft 1 has a tapered shape narrowed to its tip. The ball 2 is made of carbon, ceramic, or metal and has a diameter between 0.02μm and 100μm. COPYRIGHT: (C)2008,JPO&INPIT
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