TRANSMISSION TYPE DIFFRACTION GRATING

摘要

A transmission diffraction optical element is presented in which ridges having a roughly rectangular cross-section shape are disposed parallel to each other at a regular pitch at the surface of a substrate. Striped thin-film layers are formed on these ridges and a thin-film layer is inserted between the substrate and the ridges. The thin-film layers are arranged at a regular pitch identical to the regular pitch of the ridges and the thin-film layer does not have a periodic pattern oriented in the same direction as the periodic pattern of the ridges.