发明名称 |
METHOD AND APPARATUS FOR ALIGNMENT FILM, ALIGNMENT FILM, AND LIQUID CRYSTAL DEVICE |
摘要 |
A first film is formed on a substrate by oblique deposition and thereafter a second film is formed on the first film by sputtering.
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申请公布号 |
US2008186438(A1) |
申请公布日期 |
2008.08.07 |
申请号 |
US20080026085 |
申请日期 |
2008.02.05 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SAKAI AKIRA;AIBA TOSHIAKI;ISHIDA YOHEI |
分类号 |
G02F1/1337;G02F1/13 |
主分类号 |
G02F1/1337 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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