发明名称 METHOD AND APPARATUS FOR ALIGNMENT FILM, ALIGNMENT FILM, AND LIQUID CRYSTAL DEVICE
摘要 A first film is formed on a substrate by oblique deposition and thereafter a second film is formed on the first film by sputtering.
申请公布号 US2008186438(A1) 申请公布日期 2008.08.07
申请号 US20080026085 申请日期 2008.02.05
申请人 CANON KABUSHIKI KAISHA 发明人 SAKAI AKIRA;AIBA TOSHIAKI;ISHIDA YOHEI
分类号 G02F1/1337;G02F1/13 主分类号 G02F1/1337
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