| 摘要 |
A capacitance type sensor includes a first flange having four flexible portions and fixed to a base 300 ; and a second flange having four flexible portions and being opposed to the first flange. A connecting shaft standing at the center of each flexible portion of the first flange is connected to a connecting shaft standing at the center of each flexible portion of the second flange. A pair of electrodes E 11 and E 12 ; a pair of electrodes E 21 and E 22 ; a pair of electrodes E 31 and E 32 ; and a pair of electrodes E 41 and E 42 are fixed on the upper face of the base 300 . The sets of pairs of electrodes, flexible portions of the first flange, flexible portions of the second flange, and connecting shafts are arranged around the Z-axis at regular angular intervals of 90 degrees at the same distance from the Z-axis.
|
