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发明名称
VERFAHREN ZUR ABSCHEIDUNG VON AMORPHEN, WASSERSTOFFHALTIGEN SILIZIUMSCHICHTEN
摘要
申请公布号
DE50114048(D1)
申请公布日期
2008.08.07
申请号
DE20015014048
申请日期
2001.03.08
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
SZYSZKA, BERND DR;KLAGES, CLAUS-PETER;JIANG, XIN;JUNG, THOMAS
分类号
C23C14/00;C23C14/16
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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