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发明名称
Verfahren zur Vermessung einer Struktur auf einem Halbleiterwafer mit einem Rasterelektronenmikroskop
摘要
申请公布号
DE102004004597(B4)
申请公布日期
2008.08.07
申请号
DE200410004597
申请日期
2004.01.29
申请人
QIMONDA AG
发明人
MARSCHNER, THOMAS
分类号
H01L21/66;G01B15/04;G03F7/20;H01L21/8242
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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