| 摘要 |
<P>PROBLEM TO BE SOLVED: To specify flaw regions generated by the same cause of a flaw regardless of the positional relation of the flaws produced in an inspection target image. <P>SOLUTION: In flaw region jointing processing, the similarity of mutual individual flaw regions, wherein the distance between the individual flaw regions in the inspection target image is within a predetermined threshold value, is calculated and, in the case where the simirality coincides, primary flaw region jointing processing jointed as a primary flaw region is performed. Then, secondary flaw region jointing processing for jointing the primary flaw region, which is fitted to the jointing condition shown in a secondary flaw region jointing rule data base, as a secondary flaw region is performed. <P>COPYRIGHT: (C)2008,JPO&INPIT |
