| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such problems that a plurality of distributed power units, motor-driving circuits and the like are disorderly disposed and scattered resulting in such a waste as the roundaboutness of wiring and the like when amplifier racks are constituted in independent housings with circuitry and the wiring of a power unit, a motor-driving circuit and the like integrally disposed therein. <P>SOLUTION: An exposure equipment is provided with a driving object driven by a plurality of motors, motor-driving equipment to drive a motor, and an electric power amplifying unit to supply power to the motor-driving equipment. A plurality of motors to drive the driving object have motor-driving circuits individually. The motor-driving circuit is connected to the power amplifying unit in accordance with the usage and/or purpose of the driving object. <P>COPYRIGHT: (C)2008,JPO&INPIT |
