发明名称 BLUE-VIOLET LASER-SENSITIVE COMPOSITION, AND IMAGE FORMING MATERIAL, PHOTOSENSITIVE IMAGE FORMING MATERIAL AND IMAGE FORMING METHOD USING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a blue-violet laser-sensitive composition having high sensitivity to a light source or blue-violet laser light including a wavelength region of 350-430 nm, particularly suitable for use in direct drawing with a blue-violet laser, and having high sensitivity even when a photosensitive material is used in an increased thickness as a resist for substrate working in electronic material use. <P>SOLUTION: The blue-violet laser-sensitive composition contains one or more of specific amine derivatives having an aromatic hydrocarbon ring or an aromatic heterocycle as a sensitizer. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008181143(A) 申请公布日期 2008.08.07
申请号 JP20080034490 申请日期 2008.02.15
申请人 MITSUBISHI CHEMICALS CORP;NIPPON SYNTHETIC CHEM IND CO LTD:THE 发明人 MIZUKAMI JUNJI;KAMEYAMA YASUHIRO;URANO TOSHIYOSHI;FUJITA RIEKO;MIMORI MITSUSACHI
分类号 G03F7/004;G03F7/029;H01L21/027 主分类号 G03F7/004
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