发明名称 |
BLUE-VIOLET LASER-SENSITIVE COMPOSITION, AND IMAGE FORMING MATERIAL, PHOTOSENSITIVE IMAGE FORMING MATERIAL AND IMAGE FORMING METHOD USING THE SAME |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a blue-violet laser-sensitive composition having high sensitivity to a light source or blue-violet laser light including a wavelength region of 350-430 nm, particularly suitable for use in direct drawing with a blue-violet laser, and having high sensitivity even when a photosensitive material is used in an increased thickness as a resist for substrate working in electronic material use. <P>SOLUTION: The blue-violet laser-sensitive composition contains one or more of specific amine derivatives having an aromatic hydrocarbon ring or an aromatic heterocycle as a sensitizer. <P>COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008181143(A) |
申请公布日期 |
2008.08.07 |
申请号 |
JP20080034490 |
申请日期 |
2008.02.15 |
申请人 |
MITSUBISHI CHEMICALS CORP;NIPPON SYNTHETIC CHEM IND CO LTD:THE |
发明人 |
MIZUKAMI JUNJI;KAMEYAMA YASUHIRO;URANO TOSHIYOSHI;FUJITA RIEKO;MIMORI MITSUSACHI |
分类号 |
G03F7/004;G03F7/029;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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