| 摘要 |
PROBLEM TO BE SOLVED: To increase closing pressure without lowering a flow rate, in a diaphragm pump provided with an inlet-side umbrella permitting a fluid flow from an inlet-side passage to a pump chamber without permitting a fluid flow in a direction reverse to it, and an outlet-side umbrella permitting a fluid flow from the pump chamber to an outlet-side passage without permitting a fluid flow in a direction reverse to it, by positioning them, in the pump chamber formed by a diaphragm having a circular flat surface and vibrating to maximize the amplitude of its center part, at symmetrical positions decentered from a flat surface center of the diaphragm. SOLUTION: In this diaphragm pump, when a region covered with the umbrella part of the inlet-side umbrella is divided into a half (center-side region) close to the diaphragm center and a half (separate-side region) distant therefrom, the number of passage holes in the separate-side region is reduced in one embodiment thereof, and a total passage area of the passage holes in the separate-side region is set small in another embodiment thereof. COPYRIGHT: (C)2008,JPO&INPIT
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