| 发明名称 |
HIGH-EFFICIENCY, LOW-DEBRIS SHORT-WAVELENGTH LIGHT SOURCES |
| 摘要 |
<p>This invention relates generally to short-wavelength radiation from laser-produced and discharged produced plasmas, and more particularly to efficient systems and methods for obtaining short-wave length radiation.</p> |
| 申请公布号 |
WO2008094462(A1) |
申请公布日期 |
2008.08.07 |
| 申请号 |
WO2008US00993 |
申请日期 |
2008.01.25 |
| 申请人 |
HYPERION SCIENTIFIC, INC.;MACFARLANE, JOSEPH, J. |
发明人 |
MACFARLANE, JOSEPH, J. |
| 分类号 |
G01J3/10 |
主分类号 |
G01J3/10 |
| 代理机构 |
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