METHOD FOR SYNTHESIZING CORE-SHELL TYPE HYPER BRANCHED POLYMER, CORE-SHELL TYPE HYPER BRANCHED POLYMER, RESIST COMPOSITION, SEMICONDUCTOR INTEGRATED CIRCUIT, AND METHOD FOR PRODUCING SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To stably synthesize a core-shell type hyper branched polymer in a large amount.

SOLUTION: This method for synthesizing the core-shell type hyper branched polymer, comprising subjecting a monomer to a living radical polymerization in the presence of a metal catalyst, is characterized by comprising a process for using the core-shell type hyper branched polymer produced by the living radical polymerization and introducing acid hydrolysis groups into the core portion of the produced core-shell type hyper branched polymer to form the shell portion, and a process for thermally refluxing the reaction system containing the shell portion-formed core-shell type hyper branched polymer in the presence of an acid catalyst to hydrolyze a part of the acid hydrolysis groups for forming the shell portion to form the acid groups. The acid catalyst used on the formation of the acid groups is a substance which dissolves the shell portion-formed core-shell type hyper branched polymer and does not evaporate at a temperature on the thermal reflux.

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