发明名称 |
METHOD AND APPARATUS FOR IMPROVED OPERATION OF AN ABATEMENT SYSTEM |
摘要 |
In one aspect, an apparatus is provided that includes (1) an interface adapted to analyze information about an electronic device manufacturing system that produces an effluent having an undesirable material, and provide information about the effluent, and (2) an abatement system adapted to receive information about the effluent, receive the effluent, and attenuate the undesirable material. Numerous other aspects are provided. |
申请公布号 |
WO2007109081(A3) |
申请公布日期 |
2008.08.07 |
申请号 |
WO2007US06494 |
申请日期 |
2007.03.14 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PORSHNEV, PETER;CURRY, MARK, W.;RAOUX, SEBASTIEN |
分类号 |
F01N3/10;B03C3/00;B03C3/68;B08B3/12;B08B7/04 |
主分类号 |
F01N3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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